调制周期对TiN/TiAlN多层薄膜微观结构和摩擦性能的影响  

Effect of Modulation Periods on Microstructure and Tribological Properties of TiN/TiAlN Multilayer Coatings

作　　者：魏永强[1,2] 刘建伟[1,2] 文振华[1,2] 蒋志强[1,2] 

机构地区：[1]郑州航空工业管理学院机电工程学院,河南郑州450015 [2]航空制造及装备河南省高校工程技术研究中心,河南郑州450015

出　　处：《热加工工艺》2014年第18期151-155,共5页Hot Working Technology

基　　金：航空科学基金资助项目(2012ZE55011);国家自然科学基金资助项目(51401182);河南省教育厅项目(13A430397;14A140026);河南省科技厅基础与前沿技术研究计划项目(132300410241);科技攻关项目(142102210504);河南省"创新型科技团队"和河南省高校科技创新团队支持计划(2012IRTSTHN-014)

摘　　要：采用电弧离子镀方法制备了TiN/TiAlN多层薄膜,研究了调制周期对薄膜多层结构和摩擦磨损性能的影响。结果表明:在相同的沉积时间内,随调制周期的增加,多层薄膜的层数减少,每一层的厚度增加,层与层之间的区分更加清晰。摩擦磨损测试结果表明:由于多层薄膜的调制结构,引起薄膜对磨层的变化,当多层薄膜的调制周期为54 nm时,多层薄膜的摩擦系数最小;当调制周期为112 nm时,多层薄膜的摩擦系数最高;当调制周期为164 nm时,多层薄膜的磨痕宽度最小。在摩擦磨损过程中,GCr15钢球的磨损面一直处于快速磨损阶段,对磨痕能谱线扫描结果发现磨屑的主要成分是Fe和FeOx。TiN/TiAlN multilayer coatings were prepared by arc ion plating with different modulation periods. The effects of modulation periods on coatings multilayer structure and tribological properties were investigated. The results show that： in the same deposition time, with the increase of modulation period, the layers amount of multilayer coatings reduces, the thickness of monolayer increases and the distinction of different layers is clearer. From the tribological results, due to the modulation structure, the mill layer of multilayer coatings changes. When the modulation period is 54 nm, the friction coefficient is minimum value; when the modulation period is 112 nm, the friction coefficient reaches to the maximum value.When the modulation period is 164 nm, the wear scar width of multilayer coatings is minimum value. During the process friction and wear, the wear surface of GCr15 steel ball is in a rapid wear stage. From the line EDS results of wear scar, the main components of grinding debris are Fe and FeOx.

关 键 词：电弧离子镀 TiN/TiAlN多层薄膜 调制周期 摩擦磨损 

分 类 号：TB302.1[一般工业技术—材料科学与工程] TB333