微型热膜传感器的水下壁面剪应力标定研究  

Research on calibration of micro hot-film sensor for underwater wall shear stress measurement

作　　者：李晓莹[1] 李雁冰[1] 马炳和[1] 王雷涛[1] 

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,陕西西安710072

出　　处：《传感器与微系统》2014年第10期11-13,16,共4页Transducer and Microsystem Technologies

基　　金：国家重大科学仪器设备开发专项资助项目(2013YQ040911)

摘　　要：针对水下壁面剪应力的测量需求,建立了恒流模式下微型热膜传感器的剪应力测量与标定的数学模型,设计采用了扁薄矩形水槽剪应力发生装置,并在0 ～5 Pa范围内对传感器进行了测量标定实验.实验结果验证了测量与标定模型的正确性,标定实验的确定系数均超过了0.995,均方差保持在10-4量级,呈现良好的重复性与一致性,为水下壁面剪应力的测量应用奠定了重要基础.Aiming at measurement requirement for underwater wall shear stress, mathematical model for shear stress measurement and calibration in CC mode for micro thermal sensor is built, a flat thin rectangular water tunnel shear stress generation device is designed and used, measurement and calibration experiments are performed at range of 0- 5 Pa. Experimental results validate correctness of measurement and calibration model, coefficient of determination of calibration experiment exceeds 0. 995 ,RMSE is kept on the order of 10 -4 ,which indicates good repeatability and consistency, laying foundation for underwater wall shear stress measurement application.

关 键 词：微型热膜传感器 水下壁面剪应力 标定 恒流模式 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]