基于氧化铝陶瓷的耐高温平面螺旋电感的制备及测试  

Fabrication and measurement of planar spiral inductor based on alumina ceramic for high temperature applications

作　　者：任重[1,2] 谭秋林[1,2,3] 蔡婷[1,2] 郑庭丽 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [3]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《电子元件与材料》2014年第10期55-58,共4页Electronic Components And Materials

基　　金：国家自然科学基金重点项目资助(No.61335008);访问学者基金项目资助(No.2013MS03);高等学校优秀青年学术带头人支持计划资助

摘　　要：利用高温共烧陶瓷（HTCC）技术中的叠片、高温烧结工艺获得了白色致密的氧化铝陶瓷基板,并结合丝网印刷、后烧工艺在该基板上形成了平面螺旋电感图形,制备了一种陶瓷基平面螺旋电感,并在室温至800℃的温度范围内对其进行了高温性能测试。测试结果表明,当测试频率低于电感的自谐振频率时,电感的特性参数如电感、等效串联电阻以及Q值随温度、频率均发生了不同程度的改变。电感的自谐振频率对温度的平均变化量为-1.97kHz/℃,Q值最高为10.5,最佳工作频段为16-27 MHz。它是一种可应用于高温恶劣环境中的无源元件。A white dense alumina ceramic substrate was obtained by the lamination and high temperature sintering process of high temperature co-fired ceramic（HTCC） technology, and a pattern of planar spiral inductor was formed on the substrate with screen printing and post-sintering process. The ceramic-based planar spiral inductor was fabricated, and the measurement of its high temperature performance was achieved under the temperature from room temperature to 800 ℃. The results show that when the test frequency is less than the self-resonant frequency of the inductor, the characteristic parameters such as the inductance, equivalent series resistance and quality factor（Q） change with temperature and frequency in different degrees. The average change of the self-resonant frequency of the inductor to temperature is -1.97 kHz /℃, Q is up to 10.5, and the best working frequency band is 16-27 MHz. It is a passive component which can be applied in high temperature harsh environment.

关 键 词：平面螺旋电感 氧化铝陶瓷 温度 频率 阻抗 品质因子 

分 类 号：TM55[电气工程—电器]