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作 者:付东坡 赵渭江 郭鹏 朱昆 王景辉 华景山 任晓堂 薛建明 赵红卫 刘克新
机构地区:[1]Institute of Heavy Ion Physics & State Key Laboratory of Nuclear Physics and Technology,Peking University [2]The Ohio State University,Nuclear Engineering Program,Columbus,OH 43210,USA [3]Institute of Modern Physics,Chinese Academy of Science
出 处:《Chinese Physics C》2014年第10期102-106,共5页中国物理C(英文版)
基 金:Supported by National Natural Science Foundation of China(11105008,10775011)
摘 要:For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.For the purpose of producing high intensity, multiply charged metal ion beams, the dual hollow cathode ion source for metal ions (DUHOCAMIS) was derived from the hot cathode Penning ion source combined with the hollow cathode sputtering experiments in 2007. To investigate the behavior of this discharge geometry in a stronger magnetic bottle-shaped field, a new test bench for DUHOCAMIS with a high magnetic bottle-shaped field up to 0.6 T has been set up at the Peking University. The experiments with magnetic fields from 0.13 T to 0.52 T have indicated that the discharge behavior is very sensitive to the magnetic flux densities. The slope of discharge curves in a very wide range can be controlled by changing the magnetic field as well as regulated by adjusting the cathode heating power; the production of metallic ions would be much greater than gas ions with the increased magnetic flux density; and the magnetic field has a much higher influence on the DHCD mode than on the PIG mode.
关 键 词:ion source metal ion beams Penning discharge hollow cathode discharge hollow cathode sputtering magnetic bottle-shaped field
分 类 号:O572.2[理学—粒子物理与原子核物理]
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