Si、Cr的加入对TiAlN涂层抗氧化性能的影响  

Effect of Si and Cr Addition on the Oxidation Resistance of TiAlN Coatings

作　　者：胡涛[1] 朱丽慧[1] 刘振宇 刘一雄 

机构地区：[1]上海大学材料科学与工程学院 [2]A Inc.,Latrobe,PA 15650,USA

出　　处：《硬质合金》2014年第3期155-160,共6页Cemented Carbides

基　　金：国家自然科学基金资助项目(51171097);美国A公司资助项目

摘　　要：比较了阴极电弧蒸发工艺制备的Ti0.45Al0.55N、Ti0.35Al0.55Si0.1N和Ti0.3Al0.55Cr0.15N涂层在850℃和900℃的抗氧化性能。通过X射线衍射仪(XRD)、高分辨率扫描电镜(HRSEM)和能谱仪(EDS),研究Si、Cr对Ti0.45Al0.55N涂层抗氧化性能的影响。结果表明:Si和Cr的加入均能有效提高Ti0.45Al0.55N涂层的抗氧化性能,细化涂层晶粒,促进Al向涂层表面扩散形成致密的Al2O3氧化层,抑制锐钛矿型TiO2向金红石型TiO2转变,提高TiAlSiN涂层和TiAlCrN涂层的抗氧化性能。另外,TiAlCrN涂层中Cr2O3的形成进一步提高了其抗氧化性能。The oxidation resistance of Ti0.45Al0.55N, Ti0.35Si0.1N and Ti0.3Al0.55Cr0.15N coatings deposited by cathode arc evaporation at 850 ℃ and 900 ℃ was researched. X-ray diffraction （XRD）, high resolution scanning electron microscope （HRSEM） and energy-dispersive spectrometry （EDS） were used to study the effects of Si or Cr on the oxidation resistance of Ti0.3Al0.55N coating. The results show that the addition of Si or Cr is beneficial to the oxidation resistance of Ti0.3Al0.55N coating, and Ti0.3Al0.55Cr0.15N coating possesses better oxidation resistance than Ti0.3Al0.55Cr0.15N coating. Addition of Si or Cr can refine grain size and accelerate diffusion of Al to the surface of the coating to form dense Al2O3 oxidation layer. Additionally, the transformation of anatase-mtile is also retarded. Thus, the oxidation resistance of TiAlSiN coating and TiAICrN coating is increased. Meanwhile, the formation of Cr203 can further improve the oxidation resistance of TiAlCrN coating.

关 键 词：TIALN TiAlSiN TiAlCrN 涂层 抗氧化性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]