用于第一镜表面的金属玻璃薄膜研究  

Metallic glass film used for first mirror surface

作　　者：公发全[1,2] 文静[1] 谭彦楠[2] 牟宗信[1] 周徐洋 刘万发[2] 董闯[1] 

机构地区：[1]大连理工大学材料科学与工程学院,辽宁大连116023 [2]中国科学院大连化学物理研究所,中国科学院化学激光重点实验室,辽宁大连116023

出　　处：《强激光与粒子束》2014年第10期226-229,共4页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(51131002);国家高技术发展计划项目

摘　　要：为解决大口径非晶金属第一镜实现难题,在研究块体金属玻璃Co61.2B26.2Si7.8Ta4.8材料基础上,采用金属玻璃块体材料制作拼接成溅射靶材,通过非平衡磁控溅射镀膜方法,实现了Co61.2B26.2Si7.8Ta4.8非晶金属薄膜第一镜。研究结果表明:通过成分设计及合成靶材的设计,能够实现与块体金属玻璃具有相同光学特性的非晶薄膜第一镜;通过Cr成分改进,能够进一步提高非晶金属薄膜第一镜在可见光波段的光谱反射率。To solve the problem of achieving the large diameter amorphous metallic film first mirrors, based on the research of Co61.2B26.2Si7.8Ta4.8 metallic glass, splicing the amorphous glass bulks together as the target and using bulk amorphous glass as the sputtering material, by unbalanced magnetron sputtering coating method, the Co61.2B26.2Si7.8Ta4.8 amorphous metallic film first mirrors was realized. The research results show that with designing the composition and synthesis target-material, amorphous film first mirrors having the same optical properties with BMGs can be achieved; with coating Cr on the amorphous film, the spectral reflectivity of amorphous metallic film first mirrors in visible spectrum can be further increased.

关 键 词：第一镜 金属玻璃 薄膜表面 光谱反射率 

分 类 号：O756[理学—晶体学]