可伐合金腔体表面金层激光打字斑点分析  

Analysis of Laser Typing Spots at Gold-Plated Kovar Alloy Cavity

作　　者：郑雨薇[1] 包生祥[1] 饶真真[1] 张诚实[1] 闫耀 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《分析测试技术与仪器》2014年第3期164-167,共4页Analysis and Testing Technology and Instruments

摘　　要：可伐合金腔体镀金层在激光打字区出现大量污斑.采用电子显微技术,分析了斑点区域的结构和成分,根据分析结果讨论了斑点的形成机理.结果显示,斑点区域凹凸不平,金层平整性差,表面积增大,水分及Cl-不仅容易附着于此处,并且可以通过孔隙进入下层可伐合金层,反应形成氯化物和氧化物等,从而形成斑点.Based on the phenomenon that a large number of spots appear in the type area on the surface of the gold -plated kovar alloy cavity, combined with the method of electron microscopy, this paper analyzed the structure and composition of the spot area and spots formation mechanism are discussed according to the analysis result. Results show that the spots area is uneven, poor gold layer smoothness is poor and surface area is increased. Water and Cl- is not only easy to attach to here, and can reach the kovar alloy layer through pore to react to form chloride and oxides, thus forming spots.

关 键 词：可伐合金 镀金层 Cl- 

分 类 号：TM273[一般工业技术—材料科学与工程]