基于光学自由曲面的三维位移测量系统  

Three-Dimensional Displacement Measurement System Based on Optical Free-Form Surface

作　　者：房丰洲[1] 万宇[1] 朱朋哲[1] 程颖[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2014年第10期934-942,共9页Journal of Tianjin University：Science and Technology

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB706703)

摘　　要：针对数控机床、多轴位移台等多轴系统位移检测中存在的检测方法复杂、测量费用高等问题,利用光学自由曲面具有极大的设计自由度,可简化系统结构、提高系统性能的特点,设计开发了一种基于光学自由曲面的非接触式三维位移测量系统,用于普通机床、多轴位移台等多轴系统位移精度检测.通过设计光学自由曲面基准件,搭建实验平台,建立测量系统的数学模型,完成了测量系统的标定实验、测量系统精度验证实验和三维位移测量实验.结果表明,该测量系统精度达2.8,μm,可用于多轴系统的位移检测.In the displacement measurement of multi-axis systems such as computer numerical control（CNC）machine tools and multi-axis translation stages,there exist many problems. For example,the detection methods are compli-cated and the cost is high. Regarding these problems,full use was made of the advantages of great design freedom of optical freeform surface to simplify the system and improve system performance. A method of non-contact three-dimensional displacement measurement based on an optical free-form surface was proposed to detect the accuracy of multi-axis systems such as general CNC machine tools. The optical free-form surface used as datum was designed. The experimental platform was built and the mathematical model of measurement system was established. Then,the system was calibrated and its accuracy was tested. Finally,three-dimensional displacement measurement experiments were carried out. Results show that the accuracy of the measurement system was up to 2.8,μm,and the measurement system can be applied to the three-dimensional displacement measurement of multi-axis systems.

关 键 词：光学自由曲面 三维位移测量 数学模型标定 多轴系统 

分 类 号：TK448.21[动力工程及工程热物理—动力机械及工程]