飞秒激光工艺参数对加工TiC陶瓷微孔的影响  

Effect of Femtosecond Laser Parameters on TiC Ceramic Micro-Hole Drilling

作　　者：王禹茜[1] 张军战[1] 刘永胜[2] 杨小君[3] 李玮楠[3] 王春辉[2] 

机构地区：[1]西安建筑科技大学材料与矿资学院,陕西西安710055 [2]西北工业大学超高温结构复合材料重点实验室,陕西西安710072 [3]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西西安710119

出　　处：《中国激光》2014年第10期100-106,共7页Chinese Journal of Lasers

基　　金：科技部国家重大科学仪器设备开发专项(2011YQ12007504);国家自然科学基金(51002120;51032006);中国科学院瞬态光学与光子学国家重点实验室资助项目(SKLST201106)

摘　　要：用不同能量密度的飞秒激光在不同辅助气压下对TiC陶瓷进行微孔加工,采用扫描电子显微镜(SEM)、微米X射线三维成像仪(Micro-CT)和X射线光电子能谱(XPS)对微孔的形貌和化学键进行了研究。结果表明,在不同能量密度下,微孔入口圆度均不小于99%,微孔出口圆度随能量密度的增加而增大,随后趋于稳定,最大出口圆度为95%。微孔锥度随辅助气压增大而增大,当能量密度为0.51J/mm2、辅助气压为0.3MPa时,微孔锥度最佳,其长轴锥度为-0.13°,短轴锥度为0.77°。激光加工过程中,C-C键、Ti-C键断裂,在微孔附近形成包含金属Ti、Ti2O3和TiO2等物质的残渣。最后对激光与材料的作用机制进行了探讨。Drilling micro-holes in TiC ceramic with femtosecond laser in different laser fluence and assisted gas pressure has been demonstrated.Scanning electron microscope（SEM）,micrometer X-ray 3D imaging system（Micro-CT）and X-ray photoelectron spectroscopy（XPS）are used to investigate the morphology and chemical bonds of micro-holes.The results show that the circularities of micro-holes at the entry are not less than 99% when the laser fluence varies.The circularities of micro-holes at the exit increase as the laser fluence grows,then it tend to be stable.The maximum value of the circularity at the exit is 95%.The taper of micro-holes increases with the assisted gas pressure.When the laser fluence is 0.51 J/mm^2,the taper of micro-holes drilled with 0.3 MPa gas pressure is the best,its long axis taper is-0.13°and the short axis taper is 0.77°.C-C bonds and Ti-C bonds rupture while debris which contains metal Ti、Ti2O3 and TiO2 forms around the micro-holes during laser drilling.Lastly,the mechanism of interactions between laser beam and materials is discussed.

关 键 词：超快光学 飞秒激光 微孔加工 TiC陶瓷 能量密度 辅助气压 

分 类 号：TN249[电子电信—物理电子学]