空间调制傅里叶变换红外光谱仪分束器楔形误差分析  

Analysis of Wedge Error of Beam Splitter in Spatial Modulation Fourier Transform Infrared Spectrometer

作　　者：吕金光[1] 梁静秋[1] 梁中翥[1] 秦余欣[1] 田超[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2014年第10期286-291,共6页Acta Optica Sinica

基　　金：国家自然科学基金(61027010;60977062;61376122);国家高技术研究发展计划(2009AA04Z315);吉林省科技发展计划(201205025;20130206010GX);长春市科技计划(2011131;2013261);应用光学国家重点实验室自主基金

摘　　要：由于空间调制傅里叶变换红外光谱仪中分束器加工精度的限制,分束器基片会存在一定的楔形误差。通过对光束在分束器中传播特性的分析,计算得到楔形误差的楔角引入的光程差改变,进而获得干涉光强和复原光谱与楔角之间的函数关系;通过数值仿真发现,楔形误差会导致复原光谱中谱线向低频方向发生频移,并且会降低光谱的分辨率。通过理论分析,得到波数精度与光谱分辨率所对应的楔角误差容限。针对于楔形误差导致的干涉图像光强分布变化,提出了利用离散光谱序列解线性方程组的光谱校正方法,取得了满意的光谱校正效果。Due to the restriction of manufacture precision to beam splitter in spatial modulated Fourier transform infrared spectrometer, the wedge error will be existed on the substrate of beam splitter. Through the analysis of the propagation characteristics of the beam in beam splitter, the deviation of optical path difference caused by the wedge angle is gained, and then the functional relations between interference irradiance and wedge angle error, recovered spectrum and wedge angle error are obtained. The result shows that the wedge error can induce the spectral line shift to lower frequency and reduce the spectral resolution by means of simulation. After the theoretical analysis, the error tolerance of wedge angle under the wavenumber precision and spectral resolution is gained. Aiming at the interferogram intensity distribution influenced by wedge angle, a method of spectrum correction resolving the linear equation by discrete spectrum sequence is put forward, and the correction effect is proved well.

关 键 词：光谱学 分束器 楔形误差 误差分析 

分 类 号：O433.1[机械工程—光学工程]