基于氧化铝陶瓷的电容式高温压力传感器  

A Capacitive High Temperature Pressure Sensor Based on Alumina Ceramic

作　　者：李晨[1,2] 谭秋林[1,2,3] 张文栋[1,2] 薛晨阳[1,2] 贾平岗[1] 李运芝[2] 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [3]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《传感技术学报》2014年第8期1038-1042,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61335008);高等学校优秀青年学术带头人支持计划(2013)

摘　　要：氧化铝陶瓷因其稳定的机械性能和高温鲁棒性得到了广泛的应用。文章以LC谐振电路为技术背景,提出了一种基于氧化铝陶瓷的电容式高温压力传感器,并通过厚膜集成工艺技术将一个定值电感与一个可变电容集成在氧化铝陶瓷基板上实现了传感器的制备。对传感器进行高温环境下的压力测试,实验结果表明:传感器能够完成600℃高温环境下1到5 bar范围内压力的原位测试,且在600℃高温环境下传感器的重复性误差,迟滞性误差和零点漂移分别为8.3%,5.05%和3.7%。Alumina ceramic has wide applications with its stable mechanical toughness and high temperature robustness. In the technical background of LC resonance circuit,this paper presents a capacitance high temperature pressure sensor based on alumina ceramics.A fixed inductance and a varied capacitance were integrated on the ceramic substrate through the thick film integrated technology.The sensor was tested in high temperature and pressure environments,and the experimental results shown that：the sensor can complete the pressure situ test at 600 ℃in range of 1 to 5 bar,and the repeatability error,hysteresis error and zero drift of the sensor were approximately 8. 3%,5？05% and 3.7%,respectively.

关 键 词：高温传感器 压力 氧化铝陶瓷 厚膜集成技术 原位测试 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]