氧化铝陶瓷基无线无源压力传感器的高温性能研究  

High-Temperature Performance of Wireless Passive Pressure Sensor Based on Alumina Ceramic

作　　者：任重[1,2] 蔡婷[1,2] 谭秋林[1,2,3] 李晨[1,2] 郑庭丽 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [3]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《传感技术学报》2014年第9期1169-1173,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金重点项目(61471324);访问学者基金项目(2013MS03);优秀青年学术带头人支持计划项目

摘　　要：利用高温烧结陶瓷技术制备了一种基于氧化铝陶瓷的LC谐振式无线无源压力传感器,并通过合理地设计圆柱螺旋天线以及隔热结构,实现了该传感器在高温环境中的无线耦合测试。研究了传感器在不同温度下的阻抗频率特性,分析并探讨了传感器的高温性能。测试结果表明,在29℃(室温)至700℃的温度范围内,测试天线端的最高瞬时温度为188.4℃,保证了传感器高温测试的可靠性。谐振频率对温度的平均变化量为1.314 kHz/℃,两次重复性测试的相对变化量为3.81%,重复性较好。该压力传感器可应用于高温恶劣环境下的压力测试,其高温性能的研究为压力信号的准确读取奠定了良好的基础。A wireless passive LC resonant pressure sensor based on alumina ceramic is fabricated by the high tem-perature sintering ceramic process,and cylindrical helical antenna and a structure of insulation material are designed to realize the wireless coupling test for the sensor in high temperature environment. The high temperature perform-ance of the sensor is analyzed and discussed by studying the impedance-frequency characteristics under different temperatures. The results show that the highest instantaneous temperature of the terminal of the test antenna is 188.4℃ when the temperature is ranged from 29℃（ room temperature） to 700℃,which ensures the reliability of the test on the sensor under high temperature. The average change of resonant frequency to temperature is 1.314 kHz/℃, and the relative change of the twice tests is 3.81%,with good reproducibility. The pressure sensor can be used to measure the pressure under high temperature and harsh environment,and the study of the high temperature perform-ance of the sensor laid a good basis for accurately reading the pressure signal.

关 键 词：压力传感器 无线无源 高温 零点温漂 谐振频率 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]