大气压射频微等离子体放电结构演化的粒子模拟  

PIC-MCC Simulation of the Discharge Structure Evolution in Atmospheric Radio-frequency Microplasmas

作　　者：张远涛[1] 刘冰[1] 葛蕾[1] 

机构地区：[1]山东大学电气工程学院山东省特高压输变电技术与气体放电重点实验室,济南250061

出　　处：《高电压技术》2014年第10期2997-3005,共9页High Voltage Engineering

基　　金：国家自然科学基金(11375107);山东大学自主创新基金(2012TS067)~~

摘　　要：大气压射频微等离子体放电具有较大的潜在应用价值,但实验研究较困难。为此借助于粒子模拟的方法,在给定的放电间隙下,研究了电流密度及二次电子发射系数(SEEC)对射频微等离子体的放电结构的影响。模拟结果表明,随着输入电流密度的增大,放电空间逐渐由鞘层主导的结构转变为辉光放电结构,电子密度也会随之增大,鞘层电场逐渐增强,同时电子能量概率函数(EEPF)曲线会随之整体向上偏移;而在给定的电流密度下,随着SEEC的增大,放电结构也会逐渐由鞘层主导的结构转变为辉光放电的结构,电子密度会随之增大,同时鞘层电场会逐渐变小,高能电子(>20 eV)比例也随之减小。最后分析了在大间隙下出现鞘层主导结构的可能性。Microplasmas generated in atmospheric radio-frequency （rf） discharges is promising in many applications, butits experimental study is relatively inconvenient. Hence, we conducted a PIC-MCC simulation to study the dischargestructure evolution of atmospheric radio-frequency microplasma （ARMP）between a given electrode gap of 75μn withvarious current density and secondary electron emission coefficient（SEEC）. The simulation results show that, as the cur-rent density increases, the discharge structure gradually varies from sheath-leading discharge into glow discharge;meanwhile, electron density and electron energy both increase, the electric field in the sheath region rises, and the curveof electron energy probability function shifts upward entirely. As for a given current density, increasing SEEC makes thedischarge structure to gradually vary from sheath-leading discharge into glow discharge as well; meanwhile, plasma den-sity rises, the electric field in sheath decreases, and the proportion of electrons with energy higher than 20 eV decreases.In the end, we also discussed the possibility of sheath-leading structure appearing in a relatively larger gap.

关 键 词：大气压气体放电 射频微等离子体 放电结构 粒子模拟 二次电子 电子能量概率函数 

分 类 号：O461[理学—电子物理学] O53[理学—物理]