Development of a surface acoustic wave wireless and passive temperature sensor incorporating reflective delay line  

作　　者：WANG Wen XUE Xufeng SHAO Xiuting WANG Jianming LIANG Yong 

机构地区：[1]Institute of Acoustics,Chinese Academy of Sciences [2]Department of Electronics,Beijing Normal University,Information Science and Technology

出　　处：《Chinese Journal of Acoustics》2014年第4期406-415,共10页声学学报（英文版）

基　　金：supported by the National Nature Science Foundation of China(11074268,10834010)

摘　　要：based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave（SAW）temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers（SPUDTs）and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio（SNR）.The performance of the SAW device was simulated by the coupling of modes（COM）prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.based on optimal design on the core element of the sensor,a wireless and passive surface acoustic wave（SAW）temperature sensor integrated with ID Tag was presented.A reflective delay line,which consists of a transducer and eight reflectors on YZ LiNbO3 substrate.Was fabricated as the sensor element,in which,three reflectors were used for temperature sensing,and the other five were for the ID Tag using phase encoding.Single phase unidirectional transducers（SPUDTs）and shorted grating were used to structure the sAW device,leading to excellent signal to noise ratio（SNR）.The performance of the SAW device was simulated by the coupling of modes（COM）prior to fabrication.Using the network analyzer,the response in time domain of the fabricated 434 MHz SAW sensor was characterized,the measured S11 agrees well with the simulated one,sharp reflection peaks,high signal/noise,and low spurious noise between the reflection peaks were observed.Using the radar system based on FSCW as the reader unit.the developed SAW temperature sensors were evaluated wirelessly.Excellent1 inearity and good resolution of士1℃ were observed.

关 键 词：Development of a surface acoustic wave wireless and passive temperature sensor incorporating reflective delay line COM WAVE 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]