基于飞秒激光FBG三维微结构的加工及其温度传感特性  

3D Microstructure of FBG Fabricated by Femtosecond Laser and Its Characteristics of Temperature Sensing

作　　者：刘斌[1] 戴玉堂[1] 赵前程[1] 殷广林 

机构地区：[1]武汉理工大学光纤传感技术国家工程实验室,武汉430070

出　　处：《武汉理工大学学报》2014年第7期130-133,共4页Journal of Wuhan University of Technology

基　　金：国家自然科学基金(51175393)

摘　　要：设计了一种新型微结构光纤光栅温度传感器。利用飞秒激光在光纤光栅（FBG）包层部分加工微结构,在含微结构的包层部分镀温度敏感膜,并通过实验对传感器的灵敏度等特性进行了测试。结果表明,传感器具有较好的线性度和可重复性,双螺纹微结构的光纤光栅的温度灵敏度可达30pm/℃,是传统光纤光栅灵敏度的3~4倍,有利于扩展其工程应用范围。A novel microstructural temperature sensor was proposed and designed.Microstructure was ablated in the cladding of FBG by using femtosecond laser,and temperature-sensitive film was deposited on the microgrooves,the sensitivity response characteristics of the sensor were tested experimentally.The experimental results demonstrate that the sensor has good linearity and repeatability.FBG probe with double thread has a sensitivity of 30pm/℃ responding to temperature change,and it is three or four times higher than standard FBG.So,it can enlarge its engineering application range.

关 键 词：光纤光栅 温度传感器 飞秒激光 敏感薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]