ITO靶材的断口分析  

Fracture Morphology Analysis of ITO Target

作　　者：曾纪术[1] 陈锦全[1] 杨眉[1] 吴伯增[1] 

机构地区：[1]广西华锡集团股份有限公司,广西柳州545006

出　　处：《有色金属（冶炼部分）》2014年第10期64-68,共5页Nonferrous Metals（Extractive Metallurgy)

基　　金："十一五"国家科技支撑计划项目(2007BAE24B01)

摘　　要：对国产与日本产两种ITO靶材进行全面的分析对比,并对ITO靶材的断口形貌与靶材黑化结瘤之间的关系进行了探讨。结果表明,国产靶材与日本靶材的相对密度、电阻率、失氧率等参数比较接近,二者均为单一晶相的固溶体。国产靶材的断面为"解理+韧窝"的脆—韧混合断裂,断裂面晶界上出现了粒径较大的无规则颗粒物;而日本靶材断面为解理脆性断裂,断裂面晶界清晰,无颗粒物出现。Two ITO target samples provided from China and Japan were thoroughly analyzed and compared. The relationship between fracture morphology and mechanism of nodule formation of ITO target were discussed. The results show that majority parameters of both materials are analogous, such as relative density, electrical resistivity and oxygen deficiency. The two samples are in form of single phase crystal solid solution. The domestic material is a mixture of quasicleavage and dimple with large sized irregular particles in grain boundary. The Japan target is of cleavage fracture with clear grain boundary and invisible particle in grain boundary.

关 键 词：ITO靶材 断口 混合酸 结瘤 

分 类 号：TG111.91[金属学及工艺—物理冶金]