一种新结构介观压光型微加速度计  

A new structure accelerometer based on Meso-Piezoptic

作　　者：彭鹏[1,2] 温廷敦[1,3,2] 许丽萍[1] 

机构地区：[1]中北大学理学院,山西太原030051 [2]中北大学电子测试技术国家重点实验室,山西太原030051 [3]中北大学微米纳米技术研究中心,山西太原030051

出　　处：《红外与激光工程》2014年第10期3363-3367,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(60776062;50730009);国家自然科学基金仪器专项基金(61127015)

摘　　要：对镜像异质三周期光子晶体的研究理论表明,在实际应用范围内,透射率与光子晶体所受的轴向应力呈简单的线性关系。据此,设计一种能实现微梁直拉直压的加速度计,微梁很小很敏感,处于轴向直拉直压位置时,能极大提高结构的灵敏度和自由振动频率。以镜像异质三光子晶体替代以往的压敏电阻,只需检测其透射率,即可得出加速度大小。最后结果表明:当透射光强改变1酃时,该结构可以感知小于0.4mgn的加速度的变化,测量量程可达3.2gn。Theoretical study about mirror shows, in application range, transmissivity has a simple linear relationship with the axial stress to photonic crystal. Accordingly, a new structure accelerometer with axially deformed tiny beams was designed. Tiny beams are sensitive, so the sensitivity and frequency of free vibration of the structure will be increased significantly when tiny beams were in axial position. Using mirror triply periodic photonic crystal replace the original pressure sensitive resistor as the sensing element. Detecting the transmissivity of the photonic crystal, the magnitude of the acceleration can be calculated. It is shown that this structure can measure less than 0.4 mgn when the transmissivity intensity changes one out of 1？ and its measuring range is up to 3.2 gn.

关 键 词：光子晶体 透射率 加速度计 直拉直压 灵敏度 

分 类 号：V241.4[航空宇航科学与技术—飞行器设计]