(TiAlNb)N多组元硬质反应膜研究  

Synthesis and Characterization of Multi-Component(TiAlNb)N Coatings

作　　者：尹利燕 张钧[1] 

机构地区：[1]沈阳大学机械工程学院,沈阳110044

出　　处：《真空科学与技术学报》2014年第10期1005-1011,共7页Chinese Journal of Vacuum Science and Technology

基　　金：辽宁省教育厅科学技术研究一般项目(L2012430);沈阳市科技计划项目(20141111)

摘　　要：采用多弧离子镀技术,通过采用Ti-Al合金靶及Ti-Nb靶的组合方式,在高速钢基体上制备了( TiAlNb)N多组元硬质反应膜。利用扫描电镜、X射线衍射仪对( TiAlNb)N膜层表面、断面形貌、成分、相结构进行观察测定;系统考察了( TiAlNb)N膜层的显微硬度、膜/基附着力、摩擦磨损及热震阻力等力学性能;结果表明,少量添加Nb的( TiAlNb)N多组元硬质膜为面心立方结构,具有良好的硬度、附着强度、耐磨性和抗热震性。The multi-component （TiA1Nb）N coatings were deposited by multi-arc ion plating with Ti-A1 and Ti-Nb alloy targets on substrate of high speed steel. The impacts of the synthesis conditions, including the Nb-content, nitrogen partial pressure, and substrate bias, on the microstructures, phase structure, and mechanical properties of the coatings were investigated. The multi-component （TiA1Nb）N coatings were characterized with X-ray diffraction, energy dispersive spec- troscopy, scanning electron microscopy, and conventional mechanical probes. The results show that the Nb-content signiii- candy improves the surface mechanical properties and interface adhesion. For example, biased at 200 V, the fcc-phased, （111）preferentially oriented coatings displayed the highest wear-resistance, low friction coefficient. After 9 ~ 10 thermal shock cycles at 650~C, only some micro-cracks were observed on the Nb-doped coatings with a micro-hardness of HV3200 and an interface adhesion of 100 N, indicating that its also has a high thermal shock resistance.

关 键 词：(TiAlNb)N 显微硬度 附着力 摩擦磨损 热震 

分 类 号：TB43[一般工业技术]