离子能流密度对AISI304不锈钢氮化层摩擦性能的影响  

Improvement of Tribological Property by Nitriding AISI 304 Stainless Steel

作　　者：徐林[1] 巴德纯[1] 王庆[1] 郭德宇 

机构地区：[1]机械工程与自动化学院东北大学,沈阳110819

出　　处：《真空科学与技术学报》2014年第10期1019-1023,共5页Chinese Journal of Vacuum Science and Technology

基　　金：沈阳市科技攻关计划项目(No.F12028200)

摘　　要：采用低温等离子体氮化技术,对AISI304不锈钢进行表面氮化处理。考察了离子能流密度对不锈钢氮化层性能的影响。运用X射线衍射、扫描电镜和显微硬度计等分析手段对氮化层的物相组成及表面硬度进行分析及测量;利用球-盘摩擦实验在干摩擦条件下对氮化层的摩擦磨损性能进行测试。结果表明:AISI304不锈钢经低温等离子体氮化处理后,形成单一高氮面心立方相γN。在氮化处理过程中,离子能流密度受工作压力及基片负偏压影响较大。离子能流密度变化能显著影响不锈钢氮化层的摩擦性能,随着离子能流密度的增加,氮化层显微硬度增大,摩擦系数减小,耐磨损性能上升。The surfaces of AISI304 stainless steel were modified by low-temperature plasma nitriding. The effects of the nitriding conditions, including but not limited to the energy of ion current, substmte bias voltage, and pressure, on the mechanical properties of nitrided substmte were evaluated. The nitridedcoatings were characterized with X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, and conventional mechanical probes. The results show that the compact nitridedcoatings, consisting mainly of a N-rich face-center-cubic phase（γN）, significantly improved the mechanical properties, and that depending on the pressure and substrate bias voltage, the energy of ion current had a major impact on tribological property of the nitrided surfaces. For example, as the energy of ion current increased, the microhardness and dry-sliding wear resistance increased, but the friction coefficient decreased.

关 键 词：AISI304不锈钢 氮化层 表面改性 能流密度 摩擦性能 

分 类 号：TB43[一般工业技术]