数字气压传感器的一种高效标定和补偿方法  

A high efficient method for calibration and compensation of digital air pressure sensor

作　　者：李亮[1,2] 杜利东[1] 赵湛[1] 卫克晶[3] 

机构地区：[1]中国科学院电子学研究所传感器技术联合国家重点实验室,北京100190 [2]中国科学院大学,北京100080 [3]解放军理工大学气象海洋学院探测与装备工程教研中心,江苏南京210007

出　　处：《传感器与微系统》2014年第11期44-47,共4页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2012AA040504);国家自然科学青年基金资助项目(51305423)

摘　　要：硅压阻式压力传感器受制造工艺和测量环境的影响,其输出大都具有一定的非线性,其中以温度的影响最为明显。鉴于此,传感器需要准确地标定测试和温度补偿,首先制作一种带有高精度AD和微处理器的数字气压传感器,用它采集数据;然后分析测试设备,确定采用恒压变温的标定方案,它不仅效率高,而且能准确反映传感器的温度和输出特性;最后用最小二乘算法在微处理器上实现温度补偿,补偿后传感器的输出精度满足了应用需求。Influenced by manufacturing technology and measurement environment, especially temperature, output of Si piezo-resistive pressure sensor mostly is non-linear. So it is necessary for sensor to accurately calibrate, test and temperature compensation, firstly, fabricate a digital air pressure sensor which contains high precision AD and microprocessor to collect datas, then analyze test equipment and decide to adopt scheme of variable temperature at constant pressure. This method is very efficient and can describe features of temperature and output of sensor exactly. Finally, temperature compensation is carried out on microcontroller by least square method, output precision of sensor after compensation meet demand of application.

关 键 词：硅压阻式压力传感器 标定测试 温度补偿 最小二乘法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]