Non-contact angle measurement based on parallel multiplex laser feedback interferometry  

作　　者：张松 谈宜东 张书练 

机构地区：[1]State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments,Tsinghua University

出　　处：《Chinese Physics B》2014年第11期320-324,共5页中国物理B（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant No.61036016)

摘　　要：We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry （PLFI）, which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non- cooperative targets. Experimental results show that PLFI has an accuracy of 8＂ within a range of 1400＂. The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A.We present a novel precise angle measurement scheme based on parallel multiplex laser feedback interferometry （PLFI）, which outputs two parallel laser beams and thus their displacement difference reflects the angle variation of the target. Due to its ultrahigh sensitivity to the feedback light, PLFI realizes the direct non-contact measurement of non- cooperative targets. Experimental results show that PLFI has an accuracy of 8＂ within a range of 1400＂. The yaw of a guide is also measured and the experimental results agree with those of the dual-frequency laser interferometer Agilent 5529A.

关 键 词：laser feedback angle measurement non-cooperative targets 

分 类 号：TN249[电子电信—物理电子学]