自支撑硅氧碳纳米镶嵌复合薄膜基板的制备及导热性能研究  

Fabrication and characterization of freestanding β-SiC/SiO_xC_y/C_(free) heat dissipation ceramic films by precursor method

作　　者：姚荣迁[1,2,3] 符长平 张帅丰 毛宇[1,2] 冯祖德[1,2] 

机构地区：[1]厦门大学材料学院,福建厦门361005 [2]厦门大学福建省特种先进材料重点实验室,福建厦门361005 [3]厦门大学深圳研究院,广东深圳518057

出　　处：《功能材料》2014年第23期23122-23125,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(51302237);福建省科技计划重点资助项目(2012H0036);深圳市知识创新计划资助项目(JCYJ20130329150151156);厦门大学基础创新科研基金资助项目(CXB2013018)

摘　　要：利用先驱体熔融纺膜法,经熔融纺膜、氧化交联及900-1200 ℃不同裂解温度制得系列自支撑硅氧碳纳米镶嵌复合薄膜.利用红外光谱（FT-IR）分析氧化交联后及高温裂解薄膜的结构变化,通过X 射线衍射（XRD）、拉曼光谱（Raman）与扫描电镜（SEM）对薄膜微观结构及形貌进行分析,采用电阻测试仪和激光热导仪对其进行电阻率与热导率进行表征.结果表明,硅氧碳纳米镶嵌复合薄膜具有较好的绝缘性能与热传导能力,随着裂解温度升高,薄膜电阻率减小,热导率大幅度增大.1200 ℃制备的样品具有合适电阻率和最佳热导率（46.8 W/（m·K））,薄膜以非晶态相SiOxCy 和游离碳为基体,细小等轴β-SiC晶弥散分布在基体中,其表面平整度高通过丝网印刷可获得两条平行的均匀致密高温银浆电路层,有望大规模应用于大功率LED封装散热基板.Freestandingβ-SiC/SiOx Cy/Cfree nanocomposite films were synthesized by melt spinning the polycar-bosilane (PCS)precursor.Their microstructure were characterized by Fourier transform infrared (FT-IR),X-ray diffraction (XRD)and Raman spectroscopy,morphology analysis was investigated by scanning electron mi-croscope (SEM).Resistivity and thermal conductivity of the films were measured at room temperature.Effect of pyrolysis temperatures on the heat dissipation properties of nanocomposite films were investigated.The re-sults show that thermal conductivity increases as the resistivity of theβ-SiC/SiOx Cy/Cfree films decreases by in-creasing pyrolysis temperatures.The sample sintered at 1 200 ℃ with good insulation (2.1 ×108 Ω·m)and high heat transfer capability (46.8 W/(m·K))can be silk-screened and used as heat dissipation substrate for high-power LED devices.The obtained results are expected to have important applications in high-temperature electronic and advanced optoelectronic devices.

关 键 词：自支撑硅氧碳薄膜 先驱体法 热导率 基板 

分 类 号：TB34[一般工业技术—材料科学与工程] TN305.94[电子电信—物理电子学]