激光辅助局部电化学沉积的试验研究  

Experiment of Laser-Assisted Localized Electrochemical Deposition

作　　者：蔡明霞[1] 张朝阳[1] 姜雨佳[1] 苏纯[2] 冯钦玉[1] 黄磊[1] 

机构地区：[1]江苏大学机械工程学院激光技术研究所,镇江212013 [2]常州工学院机电工程学院,常州213000

出　　处：《南京航空航天大学学报》2014年第5期769-773,共5页Journal of Nanjing University of Aeronautics & Astronautics

基　　金：国家自然科学基金(51275218)资助项目;江苏省精密与微细制造技术重点实验室开放基金(BM2012009)资助项目;江苏省数字化电化学加工重点建设实验室开放基金(KFJJ2004007)资助项目

摘　　要：在局部电化学沉积加工体系中引入纳秒脉冲激光,利用激光辐照和局部电化学沉积的方法对铜进行三维微结构的沉积试验。分析了激光的热力效应对局部电化学沉积的作用机理。构建了激光辅助局部电化学沉积的试验系统,进行了沉积试验,并利用扫描电子显微镜(Scanning electron microscope,SEM)和X射线能量色散色谱仪对电沉积体进行了检测。试验结果表明激光辅助局部电化学沉积相较于普通的局部电化学沉积,定域性好。随着激光能量的增加,沉积体的高宽比增加,定域性提高。同时,激光还可以减少阴极杂质的吸附,提高沉积体的纯度。Pulse laser is introduced in the localized electrochemical deposition system,and three-dimensional copper microstructures are constructed by a compound processing of laser irradiation and localized electrochemical deposition deposition.The thermal effect and plasma effects of the laser on localized electrochemical deposition are analyzed.The experimental system of laser-assisted localized electrochemical deposition is established,and experiments are carried out.The scanning electron microscope （SEM） and energy dispersive X-ray spectroscopy are utilized to detect the electroplated structures.The results show that compared with the electroplated features grown without laser irradiation,the electroplating speed of features grown with laser irradiation is faster and the localization is better.With the increase of the laser energy,the depositing aspect ratio increases.Meanwhile,with laser irradiation,the impurities of cathode are reduced.

关 键 词：局部电化学沉积 激光辐照 高宽比 定域性 

分 类 号：TN249[电子电信—物理电子学]