亲水性固结磨料研磨垫自修整机理探索  

Self-Conditioning Mechanism of Hydrophilic Fixed Abrasive Pad

作　　者：徐俊[1] 朱永伟[1] 朱楠楠[1] 王建彬[1] 李军 

机构地区：[1]南京航空航天大学机电学院,江苏省精密与微细制造技术重点实验室,南京210016

出　　处：《纳米技术与精密工程》2014年第6期429-434,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51175260);中央高校基本科研业务费专项资金资助项目(NP2012506);江苏高校优势学科建设工程资助项目

摘　　要：自修整特性是亲水性固结磨料研磨垫(FAP)的重要性能之一.为了探究其自修整的实现机理,使用PHL-350型平面高速研磨抛光机对K9玻璃圆片进行马拉松式实验.研究了研磨压力和孔隙对研磨垫自修整性能的影响.实验表明:研磨压力从0.15 MPa提高到0.20 MPa,研磨垫的自修整效果显著提高,经过一段时间后,1#研磨垫和2#研磨垫的材料去除速率分别保持在10μm/min和8μm/min以上.同时,成孔剂的加入使基体砂浆磨损率提高了近7倍,提高了固结磨料研磨垫的材料去除速率的稳定性.因此,提高压力和适当弱化基体有助于实现固结磨料研磨垫的自修整过程.Self-conditioning is one of the key performances of fixed abrasive pad（ FAP）. In order to investigate implementation mechanism of its self-conditioning,PHL-350 high speed lapping and polishing machine was used for a Marathon experiment on K9 glass wafer. The influence of lapping pressure and pore on the self-conditioning performance of FAP was studied. Results show that the self-conditioning performance of FAP improves a lot with a rise of applied pressure from 0. 15 MPa to 0. 20 MPa and the material removal rate of Pad 1 and Pad 2 kept stable at above 10 μm / min and 8 μm / min after a certain period of time. Meanwhile,the slurry wear rate almost increased by 7 times with the addition of pore forming additive,improving the stability of material removal rate of FAP. Therefore,increasing applied pressure and weakening FAP matrix benefit the self-conditioning process of FAP.

关 键 词：亲水性固结磨料研磨垫 自修整 研磨压力 孔隙 材料去除速率 

分 类 号：TG580.68[金属学及工艺—金属切削加工及机床]