Al/Ti双层薄膜TES的光子数分辨特性表征  

The photon number resolution characterization of Al / Ti bilayer film TES

作　　者：董文慧[1] 张青雅[1] 刘建设[1] 李铁夫[1] 陈炜[1] 

机构地区：[1]清华大学微电子学研究所,清华信息科学与技术国家实验室,北京100084

出　　处：《低温与超导》2014年第11期44-47,共4页Cryogenics and Superconductivity

基　　金：国家重点基础研究发展计划(2011CBA00304);国家自然科学基金(60836001;61174084;61106121;U1330201);清华大学自主科研计划(20131089314)资助

摘　　要：报道了Al/Ti双层薄膜超导TES的光子数分辨特性。通过设计双层薄膜的尺寸,使其满足光子数分辨所需的热导、热容需要,制备出了完好的TES。在320m K的低温下,通过测试其对1550nm光脉冲的响应,发现等效光子数分辨率可达到40个左右。这是使用超导TES实现单光子探测及进一步实现量子通讯的重要基础。This paper reported the photon number resolution of the Al/Ti bilayer superconducting TES. By designing the size of the bilayer films, we could make thermal conductivity and heat capacity to meet the requirement of the photon number resolution. The authors fabricated intact TES. At the low temperature of 320inK, by testing the response to 1550nm pulse, we found that the equivalent photon number resolution could reach 40 or so. This is the important basis of realizing single photon detection and quantum communication by superconducting TES.

关 键 词：Al/Ti双层薄膜 TES 光子数分辨 

分 类 号：O484[理学—固体物理]