功率对氘代辉光放电聚合物结构和力学性能的影响  

Influence of radio frequency power on structure and property of carbon-deuterium glow discharge polymer films

作　　者：刘浩[1,2] 何智兵[2] 何小珊[2] 贾晓琴[1,2] 韦建军[1] 

机构地区：[1]四川大学原子与分子物理研究所,成都610065 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2014年第12期124-128,共5页High Power Laser and Particle Beams

基　　金：国家高科技发展计划项目

摘　　要：采用射频辉光放电聚合技术,在低压等离子体聚合装置上开展在5～20W功率下氘代辉光放电聚合物薄膜的制备及性能研究.利用傅里叶变换红外吸收光谱仪表征薄膜的化学结构,讨论了功率变化对其官能团结构的影响规律.利用元素分析仪和纳米压痕仪表征薄膜中氘原子的相对含量和薄膜的力学性能.研究表明：随着功率的升高,薄膜中的氘含量先升高后降低,在10W时达到最大,薄膜中SP3CD的相对含量增加,SP3CD2的相对含量减小;聚合物薄膜的硬度和杨氏模量均随功率的增加而减小.Carbon deuterium polymer films were fabricated at different powers by the discharge polymerization technology. The difference of chemical structures was characterized by FT IR. analysis and the hardness and modulus of films were measured by The content of deuterium of films was characterized by element nanoindentation. It was found that with the RF power increas ing, the D contents in the films firstly increased, then decreased, and reached to the biggest at 10W. The CD bands content in creased, while the CD2 bands content decreased. The hardness and modulus of films decreased when the RF power increased.

关 键 词：等离子体聚合 氘代辉光放电聚合物 红外吸收谱 力学性能 

分 类 号：O484[理学—固体物理]