Ti-Mo吸气材料在不同工作温度下的性能研究  

Influence of Temperature on Ti-Mo Gettering Characteristics

作　　者：张艳[1] 崔建东[1] 苑鹏[1] 杜军[1] 

机构地区：[1]北京有色金属研究总院先进电子材料研究所,北京100088

出　　处：《真空科学与技术学报》2014年第11期1150-1154,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：利用"动态吸气法"测试了Ti-Mo吸气材料在不同工作温度条件下吸气性能的变化,采用四极质谱仪监测激活过程中真空腔体内残余气体成分及含量。结果表明:工作温度越高,材料的起始吸气速率越高,但当工作温度高于400℃后,随着温度的升高总吸气容量反而下降;在400℃条件下吸气后,材料具备良好的激活再生能力,但是经500℃吸气后,材料长期维持真空的能力降低,总吸气容量受损;随着温度的升高,H2O、CO2及碳氢化合物逐渐从吸气材料表面脱附,H2主要在200℃以上温度脱附,整个激活过程未发现O2。The influence of temperature of the lab-fabricated porous Ti-Mo disk on its pumping characteristics was experimentally investigated in dynamic gas adsorption technique and with quadrupole mass spectroscopy,respectively. The preliminary results show that the Ti-Mo getter＇s temperature has a major impact on the Ti-Mo gettering characteristics,including its initial pumping speed,total adsorption capacity,and regeneration conditions. For instance,as the temperature increased,the initial pumping speed increased,accompanied by desorption of H2 O,CO2,H2,and hydrocarbons from the getter surfaces. In its activation no oxygen was found. After pumping at 400℃,the getter could be easily re-generated. However,as the temperature rose up above 400℃,its total adsorption capacity decreased. We found that a pumping at 500℃ resulted in damage of its long-term vacuum maintenance capability and reduction of its total adsorption capacity as well.

关 键 词：吸气材料 吸气性能 工作温度 残气 

分 类 号：TB741[一般工业技术—材料科学与工程]