射频磁控溅射法沉积SiC-Al薄膜的摩擦特性  

Tribological Properties of RF Magnetron Sputtered SiC-Al Coatings

作　　者：郑锦华[1,2] 晁云峰[1] 张冲[1] 李聪慧[1] 

机构地区：[1]郑州大学化工与能源学院,郑州450001 [2]河南瑞邦能源科技开发有限公司,郑州450001

出　　处：《真空科学与技术学报》2014年第11期1178-1183,共6页Chinese Journal of Vacuum Science and Technology

基　　金：郑州市科技人才队伍建设计划.科技领军人才资助项目(131PLJRC639);河南省科技创新杰出人才计划资助项目(114100510025)

摘　　要：利用射频法非平衡磁控溅射设备在钛合金板上沉积了非晶态SiC-Al薄膜。为了降低薄膜的摩擦系数,在薄膜中添加Al原子,同时Al也被选择为中间过渡材料来提高界面结合强度和防止界面氧化。研究结果表明：薄膜摩擦系数随着Al原子含量的增加而先减后增,并在Al含量为0.97%时达到最小值。SiC-Al薄膜对SiC和Al2O3陶瓷材料的摩擦系数比对不锈钢材料的摩擦系数低,但它与SUJ2轴承钢之间的摩擦系数最低,在0.04~0.07之间。当把Al作为中间过渡材料时,SiC-Al薄膜的破坏寿命达到了20000循环以上,明显改善了薄膜的界面结合强度;当Al中间过渡层的厚度超过0.2μm以上时,薄膜破坏表现为磨损而不发生剥离现象。另外,薄膜的耐磨强度随着Al含量的增加有所增强。The amorphous Al-doped SiC（ SiC-Al） coatings were deposited by RF magnetron co-sputtering of SiC and Al targets on Ti-alloy substrate. The influence of the deposition conditions,including the Al-doping,Al-buffer layer,and pressure,on the surface tribological properties and interfacial adhesion and oxidation was evaluated. The results show that the Al-doping strongly affects the mechanical properties of SiC-Al coatings. For example,as Al-content increased,the wear-resistance slowly increased and the friction coefficient changed in a decrease-increase mode,being minimized at an Al – content of 0. 97%. Its friction coefficient against SiC or Al2O3 ceramics is lower than that against stainless steel,being the lowest against SUJ2 steel（ in 0. 04 ~ 0. 07 range）. The Al-buffer layer enables the SiC-Al coatings to sustain over 20000 cycles in fatigue-test,indicating a heightened interfacial adhesion. Moreover,for an over 2μm thick Al-buffer layer,abrasive wear dominated and no film peeling-off occurred in fatigue-test.

关 键 词：SiC-Al薄膜 中间过渡材料 摩擦特性 磨耗 界面强度 

分 类 号：O484[理学—固体物理] TB43[理学—物理]