(Ti,Al,Si,C)N硬质膜层高温性能研究  

Synthesis and High Temperature Properties of( Ti,Al,Si,C)N Hard Coatings

作　　者：王彦锋[1] 李争显[1] 王宝云[1] 华云峰[1] 杜继红[1] 姬寿长[1] 

机构地区：[1]西北有色金属研究院,西安710016

出　　处：《真空科学与技术学报》2014年第11期1202-1205,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：采用等离子增强电弧离子镀联合磁控溅射工艺制备了含35%(原子比)C的(Ti,Al,Si,C)N硬质膜层,并利用扫描电镜、X射线衍射仪及高温摩擦磨损试验仪表征了膜层在不同退火条件下的性能及组织演变行为。研究结果表明,复合膜层在低于800℃的退火条件下,膜层仍表现出较高的显微硬度、较低的摩擦系数以及氧化增重率,复合膜层的显微结构并未发生显著的变化。在800℃、氧化7 h后,膜层发生了严重的氧化失效。因此,复合膜层在长时间高温氧化下的性能仍需要进一步提高。The（ Ti,Al,Si,C）N hard coatings with 33. 5%（ at） of C were synthesized by plasma enhanced arc ion plating combined with magnetron sputtering on substrate of high speed steel. The influence of the annealing temperature and annealing time on the microstructures,textures and mechanical properties at high temperature and oxidation resistance of the hard coatings was investigated. The coatings were characterized with X-ray diffraction,electron microscopy,and conventional mechanical probes. The results show that depending on the annealing temperature,the（ Ti,Al,Si,C）N hard coating,annealed at 800℃,displays stronger micro-hardness,lower friction coefficient,higher oxidation resistance than the control sample. However,annealing at 800℃ for 7 h destroyed the（ Ti,Al,Si,C）N hard coatings,possibly because of the serious oxidation.

关 键 词：(Ti Al Si C)N 硬质膜层 高温性能 显微组织 摩擦磨损 

分 类 号：TG146.4[一般工业技术—材料科学与工程]