一种检测单晶炉热场温度的新方法  

A new method for measuring heat zone temperature of single crystal furnace

作　　者：张新雨[1] 刘丁[1] 汪姣[1] 李琦[1] 

机构地区：[1]西安理工大学自动化与信息工程学院,陕西西安710048

出　　处：《控制理论与应用》2014年第10期1310-1317,共8页Control Theory & Applications

基　　金：国家科技重大专项基金资助项目(2009ZX02011001);国家自然科学基金资助项目(61075044);教育部博士点基金(优先发展领域)资助项目(20136118130001)

摘　　要：为去除单晶炉热场温度测量信号中的低频干扰、提高温度信号的估计精度,本文提出了一种基于跨维模拟退火(trans dimensional simulated annealing,TDSA)的单晶炉热场温度检测方法.该方法首先将AIC(Akaike information criterion)信号个数判断准则纳入采样机制中以便对干扰个数采样估计,进而利用所设计的基于信号频谱和轮盘赌思想的Metropolis Hastings机制对相应个数的干扰频率进行采样,最后设计了混合均匀和高斯采样机制对单晶炉热场温度进行采样估计.仿真和单晶炉工程实验结果表明,该方法在干扰个数未知的情况下,能够有效地抑制低频干扰、准确检测单晶炉热场的温度.We propose a trans-dimensional simulated annealing （TDSA）-based method for the temperature measurementof the single crystal furnace heat zone to remove the low frequency interference and improve the estimation accuracy of thetemperature. This method firstly introduces Akaike information criterion （AIC） into the sampling mechanism to estimatethe number of interferences, and then utilizes the designed Metropolis Hastings sampling mechanism that combines thesignal frequency spectrum and roulette-based ideas to sample the estimated number of interference frequencies. Finally amixed uniform and Gaussian distribution sampling mechanism is designed to sample and estimate the temperature of thesingle crystal furnace heat zone. Simulation and practical engineering experiment results show that the proposed methodcan effectively restrain the low frequency interference and accurately detect the temperature of the single crystal furnaceheat zone with uncertain number of interferences.

关 键 词：单晶炉 热场温度检测 低频干扰 跨维模拟退火 最大似然准则 AIC准则 最小二乘法 

分 类 号：TN304.12[电子电信—物理电子学]