SiO_2/CH/Au复合黑腔诊断孔电火花加工技术  

Fabrication of diagnostic hole of SiO_2/CH/Au hohlraum by micro-electrical discharge machining

作　　者：谢军[1,2] 张昭瑞[1,2] 梅鲁生[1,2] 黄燕华[1,2] 朱磊[1,2] 刘峰[1,2] 张海军[1,2] 李国[1,2] 宋成伟[1,2] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]中国工程物理研究院超精密加工重点实验室,四川绵阳621900

出　　处：《强激光与粒子束》2014年第11期72-75,共4页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目;中国工程物理研究院超精密加工重点实验室基金项目(ZZ12002)

摘　　要：通过电火花加工技术,采用含碳较高的煤油作为电介质,利用导电性能及加工性能较好的紫铜作电极材料,实现了SiO2/CH/Au复合黑腔侧表面方形诊断孔的精密加工。采用OLYMPUS STM6测量显微镜对诊断孔尺寸,结果表明:孔的尺寸加工精度可控制在±10μm内,同一电极加工的诊断孔尺寸一致性可控制在±5μm内。采用扫描电镜能谱分析SiO2/CH/Au加工导电层的成分,结果表明:电火花加工过程中,由于电介质分解生成游离态的碳以及电极材料铜熔融后沉积在CH和SiO2层表面,形成辅助导电层。通过加工辅助导电层,产生的瞬时高温使SiO2和CH层熔融气化,从而实现对绝缘层的加工。The rectangular diagnostic hole on the side of SiO2/CH/Au hohlraum was machined by electrical discharge machining technology,and the dielectric is kerosene which has high carbon content and the electrode material is red copper which has good electrical conductivity.The size of diagnostic hole is characterized by OLYMPUS STM6 measuring microscope.The results indicate that dimension precision of the diagnostic hole is less than 10 μm,and dimension uniformity is less than 5 μm.The components of the conducting layer are characterized by EDS spectrum.The results indicate that carbon,which is product of chemical reaction of kerosene and copper and comes from the electrode,is the key component of the assistant conducting layer.

关 键 词：SiO2/CH/Au 黑腔 诊断孔 电火花加工 惯性约束聚变 

分 类 号：TG66[金属学及工艺—金属切削加工及机床]