迈克耳孙干涉仪旋转样品法测量透明玻璃厚度  

Rotating sample method to measure thickness of transparent glass wafer using Michelson interferometer

作　　者：王仁洲[1] 杨涛[1] 

机构地区：[1]南京邮电大学理学院,江苏南京210023

出　　处：《物理实验》2014年第11期24-26,共3页Physics Experimentation

基　　金：国家自然科学基金资助项目(No.61377019)

摘　　要：使用迈克耳孙干涉仪通过旋转样品测量透明玻璃厚度.与白光干涉原理测薄片厚度不同,实验通过改变在光的传播路径上垂直放置的透明玻璃与光传播方向的角度,使相干光的干涉条纹发生变化,利用干涉条纹与转过角度、透明玻璃厚度之间的关系,通过实验准确测量出透明玻璃的厚度.A rotating sample method to measure the thickness of transparent glass wafer was proposed using a Michelson interferometer. In comparison to the traditional method based on the interference of white beams, the different interference fringes were generated by changing the angle between the wafer and the light. The thickness of the transparent glass wafer was accurately measured according to the changes of the fringes and the rotation angle.

关 键 词：迈克耳孙干涉仪 透明玻璃 光程差 

分 类 号：O436.1[机械工程—光学工程]