A flexible capacitive tactile sensor array with micro structure for robotic application  

作　　者：HU XiaoHui ZHANG Xu LIU Ming CHEN YuanFang LI Peng PEI WeiHua ZHANG Chun CHEN HongDa 

机构地区：[1]Institute of Semiconductors, Academy of Sciences [2]Institute of Microelectronics, Tsinghua University

出　　处：《Science China(Information Sciences)》2014年第12期37-42,共6页中国科学（信息科学）（英文版）

基　　金：National Basic Research Program of China(973 Program)(Grant No.2011CB933203);National Natural Science Foundation of China(Grant Nos.81300803,61327809);National High-tech R&D Program of China(863 Program)(Grant No.2012AA030308);Capital Clinical Application Research(GrantNo.Z141107002514061)for the financial support

摘　　要：A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application. Micro needle layer made of polydimethylsiloxane （PDMS） is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester （PET） film. The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder. The single cell size in the fabricated 4 ~ 4 sensors array is 0.7 ~ 0.5 cm2 and the initial capacitance of each cell is 0.86 pF. The fabricated cell shows a sensitivity of 3.26%/mN within the full scale range of I kPa. The micro needle structure gives better repeatability and stability. The maximum error during each measurement is about 3.2%, while the minimum error is about 1.2%.A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application. Micro needle layer made of polydimethylsiloxane （PDMS） is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester （PET） film. The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder. The single cell size in the fabricated 4 ~ 4 sensors array is 0.7 ~ 0.5 cm2 and the initial capacitance of each cell is 0.86 pF. The fabricated cell shows a sensitivity of 3.26%/mN within the full scale range of I kPa. The micro needle structure gives better repeatability and stability. The maximum error during each measurement is about 3.2%, while the minimum error is about 1.2%.

关 键 词：capacitive sensor FLEXIBLE tactile sensor micro needle bionic robot 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]