一种基于飞秒光频梳频域干涉的绝对测距方法  

Absolute distance measurement method based on frequency-domain interference using a femtosecond optical frequency comb

作　　者：安慰宁 张福民[1] 吴翰钟[1] 曲兴华[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《仪器仪表学报》2014年第11期2458-2465,共8页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51105274);高等学校博士学科点专项科研基金(20120032130002)项目资助

摘　　要：飞秒光频梳(光梳)在激光测距领域有着重要应用。本文研究基于飞秒光频梳的频域干涉绝对测距技术,提出了一种新的基于傅里叶变换的频域峰值间隔测距方法,分析了测距原理并进行了多组绝对测距实验。实验结果表明通过频域峰值间隔测距可以实现绝对测距,被测距离1.2 mm时测距精度最高,最大误差-12 nm。在光谱的分析处理上,提出一种基于复小波变换的相位斜率测距的方法。结果表明相位斜率测距法可以实现距离信息的提取,在被测距离1.2 mm时测距精度最高,最大误差-16 nm。最后与经典傅里叶分析法进行了比较,比较结果表明频域峰值间隔测距法得到的实验结果精度好于相位斜率测距法和傅里叶分析法。Femtosecond optical frequency comb has been widely applied in both basic science and industrical manufacturing. The principle of frequency-domain interference using frequency comb is analyzed for absolute distance measurement. A frequency domain peak-to-peak interval measurement method based on Fourier transform is proposed. Experimental results show that the maximum deviation is -12 nm at the distance of about 1.2 mm. An approach of the slope of the spectral phase based on the complex wavelet transform is demonstrated for distance metrology, and the experimental results show that the maximum deviation is -16 nm at the distance of about 1.2 mm. The above two methods are compared with the method based on classical Fourier transform. The comparison results show that the frequency-domain peak-to-peak interval can achieve a higher precision, and the technique based on the complex wavelet transform can improve the accuracy of Fourier transform.

关 键 词：飞秒光频梳 绝对测距 频域干涉 光谱 

分 类 号：TH741[机械工程—光学工程] TB921[机械工程—仪器科学与技术]