多功能Parylene膜化学气相沉积系统设计  

Design of multifunctional Parylene deposition system

作　　者：谢金华[1] 陈慧[1] 段建国[1] 唐贤臣[1] 

机构地区：[1]中国工程物理研究院,四川绵阳621900

出　　处：《广东化工》2014年第22期137-138,共2页Guangdong Chemical Industry

摘　　要：分析了一般真空化学气相沉积制备Parylene膜系统的原理、组成和局限性。在通用系统的基础上,设计了一种能满足多种需求,具备多种功能的Parylene膜真空气相沉积系统。该系统能直接控制原料进入裂解炉的速率,控制基体的温度,配置的高真空单元可以对基体进行除气处理,差分四极质谱单元可以实时分析成膜过程中气体成分变化,采用O’hanlon方法可以计算气体的抽速。In the study, the principle, configuration and defect of general Parylene deposition system are summarized. A multifunctional deposition system is designed depend on general Parylene deposition system. A high temperature adjustable-flow valve is used between the sublimation furnace and the pyrolysis furnace to control dimmer flow and therefore control the chamber pressure. A diffusion pump system is assembled to increase vacuum to 10-5 Pa. Differentially Pumped quadruple mass spectrometers have been used for process analysis. The flow of vapor can be determined indirectly using methods detailed by O’hanlon.

关 键 词：PARYLENE 真空化学气相沉积 多功能 

分 类 号：TQ028.8[化学工程]