MEMS扫描镜温度可靠性测试  

Temperature reliability test of MEMS scanning mirror

作　　者：乔大勇[1] 史龙飞[2] 曹兰玉[2] 练彬[3] 

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,陕西西安710072 [2]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072 [3]西北工业大学深圳研究院,广东深圳518057

出　　处：《传感器与微系统》2014年第12期146-148,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51375399;51375400);西北工业大学基础研究基金资助项目(JCY20130119);深圳市财政委员会2012年第四批市新一代信息技术产业发展专项资金基础研究计划项目(JCYJ20120614154203639)

摘　　要：温度是MEMS扫描镜的一个重要失效因素。研究温度对MEMS扫描镜振幅的影响,再通过温度冲击试验和高低温存储试验测试温度对MEMS扫描镜可靠性的影响,分析扫描镜在试验中是否失效和失效的原因。试验结果表明:高温对MEMS扫描镜外框架和镜面振幅无影响,低温对MEMS扫描镜外框架振幅影响较大,增幅达12.3%,对镜面振幅无影响;低温存储由于水汽凝结会导致MEMS扫描镜失效,高温存储对MEMS扫描镜可靠性无影响。Temperature is an important factor in failure of MEMS scanning mirror. Influence of temperature on amplitude of MEMS scanning mirror is studied, through temperature shock, high and low temperature storage test, measure imquence of temperature on reliability of MEMS scanning mirror and analyze reasons for failure. Experimental results show that high temperature has no effect on frame and amplitude of mirror surface, but low temperature has great effect on amplitude of frame of scanning mirror, increasing 12.3 %, and has no effect on amplitude of mirror surface ; due to water vapour condensation, low temperature storage will cause failure of MEMS scanning mirror,while high temperature storage has no effect on reliability of MEMS scanning mirror.

关 键 词：MEMS扫描镜 可靠性 高低温存储 温度冲击 

分 类 号：TN306[电子电信—物理电子学]