基于声表面波热膨胀微阀研究  

Study on Thermal Expansion Micro-valve Based on Surface Acoustic Wave

作　　者：章安良[1] 王新彪[2] 付相庭[2] 查燕[2] 

机构地区：[1]常州工学院电气学院,江苏常州213002 [2]宁波大学微纳电子系统研究所,浙江宁波315211

出　　处：《压电与声光》2014年第6期880-882,887,共4页Piezoelectrics & Acoustooptics

基　　金：浙江省科技厅基金资助项目(2009R50025);浙江省重点学科基金资助项目(Xkl11077)

摘　　要：研制了一种新的声表面波控制开关的微阀。在128°YX-LiNbO3基片上光刻叉指换能器,其激发的声表面波加热微槽内石蜡油,熔融其上方微腔内固体石蜡,石蜡由于相变化而体积膨胀,使得微腔顶部的聚二甲基硅氧烷(PDMS)薄膜发生形变,微阀由开态转变为关态。红色染料溶液微流体为实验对象进行微阀操作实验,结果表明,声表面波可有效实现微阀的控制,且微阀开关时间随所加电信号功率增加而减少,在32dBm电信号功率作用下,微阀关闭时间为3min。A new micro-valve controlled by surface acoustic wave is presented. An interdigital transducer is fab- ricated on a 128°YX-LiNbO3 substrate for exciting surface acoustic wave used to heat paraffin oil in a microgroove. Solid paraffin in a micro-cavity is melted due to heating transmission. The volume of paraffin in the micro-cavity is increased by phase change, leading to the shape change of PDMS film, and then the micro-valve is switched off. Red dye solution is used to demonstrate the operation of the micro valve. Results show that surface acoustic wave can control the state of the valve, and the switching time is decreased with the power of electric power. Three minutes of switching time is obtained when the electric signal power is 32 dBm.

关 键 词：微阀 热膨胀 声表面波 微通道 微流器件 

分 类 号：TN371[电子电信—物理电子学]