显微镜物镜精密调焦装置的研究  

Study on Microscope Objective Precision Focusing Device

作　　者：周昇[1] 黄卫清[1] 朱华[1] 王寅[1] 

机构地区：[1]南京航空航天大学机械结构力学与控制国家重点实验室,江苏南京210016

出　　处：《机械与电子》2014年第12期31-34,共4页Machinery & Electronics

摘　　要：提出了利用TRUM-30型旋转超声电机为驱动元件的显微镜物镜精密调焦装置。对调焦装置的工作原理和机械结构进行了介绍和分析,设计了调焦装置的零件并对其进行了有限元分析,得出了调焦装置调焦的理论分辨率。对调焦装置进行了实验,得出了其调焦分辨率关于驱动电压信号频率的参数变化曲线,并给出了显微镜物镜运动位移随时间变化曲线。Proposed microscope obj ective preci-sion focusing device using TRUM 30 type ultra-sonic motor as drivingelement.Introduced and an-alyzed the working principle and mechanical struc-ture of the focusing device,designed the part and did finite element analysis of it,getting the micro-scope objective theoretical resolution.Did the ex-periments,getting the curve of the resolution of the microscope obj ective lens focusing varying with the driving voltage signal and it＇s frequency,and gives the curve of the displacement of the microscope ob-jective lens varing with time.

关 键 词：超声电机 显微镜物镜 精密调焦 有限元分析 

分 类 号：TH742[机械工程—光学工程]