无需参考信号的单晶炉温度干扰抑制新方法  

A novel interference suppression method without reference signal of single crystal furnace temperature

作　　者：张新雨[1] 刘丁[1] 梁军利[1] 汪姣[1] 杨文[1] 

机构地区：[1]西安理工大学自动化与信息工程学院,陕西西安710048

出　　处：《西安理工大学学报》2014年第4期379-385,共7页Journal of Xi'an University of Technology

基　　金：国家重点基础研究发展计划(973计划)基金资助项目(2014CB360508);国家自然科学基金资助项目(61075044;61172123);教育部博士点基金资助项目(优先发展领域)(20136118130001)

摘　　要：为有效地抑制单晶炉热场温度测量值中的低频干扰,改善热场温度的估计精度,提出了一种无需参考信号的新的自适应对消法。该方法将迭代自适应法引入自适应对消法中,利用迭代自适应法从输入信号中逐个估计低频干扰分量,并且在估计每个干扰分量的过程中能够减少其它分量的影响,将各个干扰分量消除。仿真和工程实验结果表明,该方法在无需参考信号的条件下,能够准确地估计各个干扰分量,从而有效地抑制单晶炉热场温度测量值中的干扰,优于现有方法,符合单晶炉热场温度控制系统的工艺要求。To suppress the low frequency interferences in the single crystal furnace heat zone tem- perature measurement values effectively and improve the estimation accuracy of the heat zone temperature, a novel method of adaptive cancellation without reference signal is presented in this paper. The method introduces the iterative adaptive approach （IAA） into the adaptive cancella- tion, and directly estimates the low frequency interference components successively with iterative adaptive approach from the input signal, as well as reduces the influences of the other components in every of the interference component estimation process, and then the interference components are eliminated from the input signal. The results of simulation and engineering experiments show that the proposed method can estimate each interference component accurately without reference signal, whereby restraining the interferences effectively in the single crystal furnace heat zone temperature measurement values. This method is superior to the existing methods and meets the technological requirements of the single crystal furnace heat zone temperature control system.

关 键 词：单晶炉热场温度 低频干扰 干扰抑制 自适应对消法 迭代自适应法 

分 类 号：TP14[自动化与计算机技术—控制理论与控制工程] TP274[自动化与计算机技术—控制科学与工程]