真空环境下基于TDLAS温度测量与校准的实验研究  

Measurement and Calibration of Temperature in Vacuum Based on Tunable Diode Laser Absorption Spectroscopy

作　　者：贾军伟[1] 张书锋[1] 彭志敏[2] 柴昊[1] 闵剑[1] 栗继军 张明志[1] 

机构地区：[1]北京东方计量测试研究所,北京100086 [2]清华大学热能系,北京100084

出　　处：《真空科学与技术学报》2014年第12期1399-1404,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：可调谐二极管激光吸收光谱(TDLAS)技术可用于气体温度的高精度快速测量,但目前TDLAS技术研究一般集中在正压范围,真空环境下该技术的应用研究较少。本文利用波长调制法对TDLAS进行真空下温度测量的溯源性和误差进行了实验研究并进行不确定度分析。实验以一等标准铂电阻温度计作为标准,以高精度恒温槽作为温源,采用自研的真空下温度校准装置,选取C2H2分子6558 cm-1附近处谱线对进行真空下的温度测量。实验结果表明:在中低温范围内,采用C2H2作为分析气体,TDLAS测温具有良好的稳定性和灵敏度,同一等标准铂电阻的误差不超过±0.2℃,测量结果的扩展不确定度U=0.24℃,k=2。A novel technique was developed to measure and calibrate gas temperature in vacuum by tunable diode laser absorption spectroscopy （TDLAS） in wavelength modulation spectroscopy （WMS） mode. The traceability and mea- surement error were experimentaUy investigated and error-analysis was performed. The rotation-vibration temperature of C2H2 molecules was measured and calibrated in vacumn by evaluating a well-chosen pair of spectral lines around 6558 cm^-1 and with a lab-built calibrator, Grade-I Pt-resistance thermometer as the standard, and a high precision thermostat as the heat source. The results show tht the newly-developed TDLAS technique is capable of measuring the rotation-vibration temperature of C2H2 molecules in vacumn with high sensitivity and good stability in low to medium temperature range. For example, the experimental uncertainty was U = 0.24℃, k = 2,and the discrepancy between the results measured by TD- LAS and the Pt-resistance thermometer was within ± 0.2℃

关 键 词：真空 温度 测量 可调谐二极管激光吸收光谱 波长调制法 

分 类 号：TN107[电子电信—物理电子学]