极真空紫外波段Al离子发射光谱的分析和模拟  

Analysis and simulations of aluminium ionic emission spectra in extreme vacuum ultraviolet wavelength region

作　　者：苏茂根[1] 刘进明[1] 敏琦 杨峰[1] 曹世权 

机构地区：[1]西北师范大学物理与电子工程学院,甘肃省原子分子物理与功能材料重点实验室,甘肃兰州730070

出　　处：《西北师范大学学报（自然科学版）》2015年第1期48-52,共5页Journal of Northwest Normal University(Natural Science)

基　　金：国家自然科学基金资助项目(11064012;11274254;11364037);甘肃省科技计划资助项目(1104WCGA186);甘肃省高等学校基本科研业务费专项基金资助项目;甘肃省自然科学研究基金资助项目(1308RJZA166)

摘　　要：利用两台Nd：YAG激光器作用于放置在真空腔室中的铝靶,获得了Al等离子体的发射光谱,并对23-35nm波段范围内的光谱进行了理论分析.结果表明实验光谱中的分立谱线主要来自于Al 5＋-Al 8＋离子的2s-2p跃迁;同时利用碰撞辐射稳态模型计算分析了不同电荷态Al离子的离子丰度随电子温度、电子密度的演化关系;最后结合激发态粒子数布局满足归一化玻尔兹曼分布的假设,获得了不同等离子体参数条件下的理论光谱,通过与实验光谱的比较,确定了等离子体参数.In this paper , the emission spectrum of Al plasma in wavelength range of 23-35 nm is obtained using the double‐pulse laser produced plasma method . It,s found that the emission lines in the experimental spectrum mainly arise from the 2s‐2p transitions of Al5＋‐Al8＋ ions . Based on a steady‐state collisional‐radiative model and the assumption of a normalized Boltzmann distribution among the excited states ,we calculate and analyze the ionic distribution among the excited states ,and the ionic abundance of different charge state as a function of plasma temperature and electron density is obtained . The theoretical spectra at the different plasma parameters are simulated .Finally ,we succeeded in reproducing a spectrum which is in good agreement with experiment .

关 键 词：极真空紫外光谱 稳态碰撞辐射模型 高电荷态铝离子 

分 类 号：O433.3[机械工程—光学工程]