浅谈电子级八氟环丁烷纯化技术  

The Purification Technology of Electronic-Grade Octafluorocyclobutane

作　　者：陈艳珊 廖恒易 

机构地区：[1]佛山市华特气体有限公司

出　　处：《低温与特气》2014年第6期28-30,共3页Low Temperature and Specialty Gases

摘　　要：对现有八氟环丁烷的用途和纯化工艺进行简述,并介绍了公司自主研发的纯化工艺,采用精馏-吸附相结合的工艺,产品符合半导体行业使用要求。In this paper,introduced the application and purification technology of octafluorocyclobutane,and also introduced the purification process of the company,using distillation and adsorption process,the products meet the requirements of the semiconductor industry.

关 键 词：八氟环丁烷 纯化 精馏吸附 

分 类 号：TQ232[化学工程—有机化工]