氧化锆粉体对片式氧传感器性能的影响  

Effect of Properties of Zirconia Powder on Performance of Planar Oxygen Sensor Chip

作　　者：冯涛[1] 王培 景文峰 粘洪强[1] 徐兵[1] 夏金峰 蒋丹宇[1] 

机构地区：[1]中国科学院上海硅酸盐研究所,上海200050 [2]中核四○四有限公司第四分公司,兰州732850

出　　处：《传感技术学报》2014年第11期1457-1463,共7页Chinese Journal of Sensors and Actuators

基　　金：质检公益性行业科研专项项目(20130260)

摘　　要：实验中采用的三种粉体,对其化学成分、物相组成、颗粒形貌、比表面积、和流延配方的匹配性、烧结性能、制备的片式传感器的性能进行了综合评估。结果表明POWDER A粉体适合流延成型,但是烧结温度较高（1 500℃）,且烧结陶瓷中会有较多的小尺寸的气孔存在,这是由于粉体中存在两种物相的氧化锆,可以制备出有很好响应的片式氧传感器。POWDER C粉体流延时制备的基片性能较软,导致后续工艺较难完成,且制备的片式传感器样品没有测得信号;POWDER B粉体制备的基片较脆,且其中的杂质含量较高,制备的片式传感器样品没有测得信号。得出对流延成型制备片式氧传感器用YSZ粉体的要求：Si及Fe的含量尽可能少;颗粒具有粒径小、粒度分布单分散;比表面积控制在12-15 m^2/g左右。Three kinds of powders were used in the experiment. Chemical composition, phase composition, particle morphology,surface area,and sintering properties,Suitability for cast taping,performance of prepared planar oxygen sensor chip were studied comprehensively. The results showed that POWDER A was suitable for tape casting,but the sintering temperature（1 500℃）is highest among those three powder,and there exist a lot of small-sized pores in sin-tered ceramics. The reason for this phenomenon is the presence of two-phase composition in POWDER A. But this powder can be prepared to planar oxygen sensor which has good response for oxygen. The substrate prepared by tape casting using POWDER C is very soft,which resulting in the follow-up process is difficult,and there is no measured signal for the preparaed planar oxygen sensor chip samples. Substrate prepared by POWDER B is brittle,and the im-purity content also is high,sample signal is not detected for the prepared sensor chip. The requirement of planar oxy-gen sensor by tape-casting for YSZ powder is：Si and Fe content should be as low as possible;particles have a small particle diameter,monodisperse size distribution;specific surface area should be controlled at 12 m^2/g-15 m^2/g.

关 键 词：氧化锆 氧传感器 片式氧传感器 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]