利用差动原理和采样补偿提高工作台精度  

Improvement of Precision for a Micro-Displacement Table Based on Differential Theory and Sampling Compensation

作　　者：王荣[1] 张敏良[1] 

机构地区：[1]上海工程技术大学机械工程学院,上海201620

出　　处：《上海工程技术大学学报》2014年第4期296-301,共6页Journal of Shanghai University of Engineering Science

基　　金：上海工程技术大学自制仪器设备资助项目(J(12)Jx-009)

摘　　要：针对精密定位工作台目前存在的高精度、大行程和低成本难以协调的问题,提出一种差动式结构的工作台,利用动态采样的方法对开环误差进行标定,建立误差模型,通过控制上下叠加的两个工作台差动对系统误差进行动态补偿.研究表明:利用差动原理对误差动态补偿的方法有效提高了工作台精度和系统灵敏度,为微位移机构的设计提供了新的思路和方法.In order to solve the coexistence problem of high precision, long-range and low-cost simultaneously, a variety of differential type of ultra-precision positioning tables was designed. Open-loop errors were gathered and demarcated by dynamic sampling method. Then error model was set up and dynamic compensation for system error was achieved through controlling the two tables differential. The study shows that the error dynamic compensation method based on differential theory and sampling compensation can effectively improve the precision of table and the sensitivity of the system,which also provides a new way for the design of a micro-displacement mechanism.

关 键 词：精密定位 差动原理 动态采样 误差建模 动态补偿 

分 类 号：TH703[机械工程—仪器科学与技术]