纳米ZnO气敏传感器研究进展  

Research Progress on Nano-ZnO Gas Sensors

作　　者：宣天美[1] 尹桂林[2] 葛美英[2] 林琳[2] 何丹农[1,2] 

机构地区：[1]上海交通大学材料科学与工程学院,上海200240 [2]纳米技术及应用国家工程研究中心,上海200241

出　　处：《材料导报》2015年第1期132-136,共5页Materials Reports

基　　金：上海自然科学基金(13ZR1429400)

摘　　要：半导体金属氧化物气敏传感器被广泛应用于有毒性气体、可燃性气体等的检测。ZnO是一种重要的半导体气敏材料,特别是纳米ZnO,由于其粒子尺寸小,比表面积大,成为被广泛研究的气敏响应材料之一。简要介绍了纳米ZnO气敏传感器的气敏机理、主要特性,综述了通过新型纳米形貌、结构制备以及元素掺杂改性提升纳米ZnO气敏性能等方面的研究进展,并进一步指出了纳米ZnO气敏传感器研究中存在的问题和未来的研究方向。The oxide based semiconductor sensors have been widely used for the detection of toxic,hazardous gases.ZnO is an important semiconductor gas sensing material,especially nano-ZnO is one of the most widely studied gas sensitive materials because of the small particle size and large specific surface area.The gas sensing mechanism and main characteristics of the ZnO gas sensor is simply introduced,and the research progress on the improvement of the nano-ZnO gas sensing properties through the preparation of specific morphology and nano structure is reviewed,and the addition of various elements is reviewed.In the end,the existing problems and the future development for nanoZnO gas sensor are further summarized.

关 键 词：氧化锌 掺杂 气敏传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]