垂直多结光伏型集成硅X射线探测器的实现和实验  

Realization and experiment of vertical multijunction integrated photovoltaic Si X-ray detector

作　　者：张治国[1,2] 

机构地区：[1]泉州师范学院功能材料研究所,泉州362000 [2]泉州师范学院物理与信息工程学院,泉州362000

出　　处：《物理学报》2014年第24期427-435,共9页Acta Physica Sinica

基　　金：福建省高校服务海西建设重点项目(批准号:A100);内蒙古自然科学基金(批准号:86044)资助的课题~~

摘　　要：介绍垂直多结器件的结构,给出了热迁移制结的工艺条件和结果;介绍了处理器件电极引线的隔离线方法,解决了经过热迁移掺杂后光刻电极套不准的难题,解决了把所有P型区域连接起来的问题,达到了敏感区金属零遮挡的目的.描述了利用展宽电极尺度的方法实现多单元器件的集成;给出了X光强与光电流电压之间的数学模型和几个重要参数,介绍了器件输出电压与X光强度之间的测量关系,理论与实际情况符合得非常好.最后对测量数据做了分析,证明器件有足够的灵敏度和分辨率.The structure of the vertical multijunction detector is introduced, and the result and technologcial conditions of preparing junction by thermomigration method are presented. In addition, the insulation line method of processing electrode wire is specially introduced;the problem of photoetching electrode after thermomigration is solved;the effects of technologcial conditions on device performance are analyzed. Besides, the difficulty in connecting all P regions is solved, and the aim of zero shade for sensitive regions is achieved. Specially, in order to realize integrating multicell device, a method of widening the size of electrode wire is described. Several important parameters are described, and the math model for the relationship of the X-ray intensity with both photovoltage and photocurrent is set up. At the same time, we introduce the measurement relation between the output voltage of the device and X-ray intensity, which shows that the measurement data and theoretical results are consistent. Finally, we analyze the measurement data, and demonstrate that the device has good enough sensibility and resolution.

关 键 词：垂直多结 集成X射线探测器 性能及测量 

分 类 号：TL816.1[核科学技术—核技术及应用]