Swing arm profilometer： improving the testing accuracy of large mirrors with shorter arms  

作　　者：罗霄 

机构地区：[1]Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanical and Physics, CAS, Changchun 130033, China

出　　处：《Chinese Optics Letters》2014年第A02期111-116,共6页中国光学快报（英文版）

摘　　要：Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 μm RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 μm RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] U467.4[自动化与计算机技术—计算机科学与技术]