Serial mode combined polishing of high-quality fiat mirror  

作　　者：张峰 

机构地区：[1]Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

出　　处：《Chinese Optics Letters》2014年第A02期117-119,共3页中国光学快报（英文版）

摘　　要：In order to obtain high-quality flat mirror, a serial mode combined polishing technology, consisting of continuous polishing （CP） and ion beam figuring （IBF）, is presented. The function of CP technology is to get certain figure accuracy and meet the requirements of the surface roughness of the flat mirror. The final high figure accuracy of the flat mirror is achieved by the IBF technology. We introduce the polishing principles of CP and IBF and then, the polishing experiment and material removal function of IBF are studied. Finally, aФ 160 mm flat mirror is polished by a serial mode combined polishing technology. After serial mode com bined polishing, the surface error and roughness of the flat mirror are 2.06 and 0.42 nm RMS, respectively. The experiment results indicate that the serial mode combined polishing technology is effective for polishing ultra-precise flat mirror.In order to obtain high-quality flat mirror, a serial mode combined polishing technology, consisting of continuous polishing （CP） and ion beam figuring （IBF）, is presented. The function of CP technology is to get certain figure accuracy and meet the requirements of the surface roughness of the flat mirror. The final high figure accuracy of the flat mirror is achieved by the IBF technology. We introduce the polishing principles of CP and IBF and then, the polishing experiment and material removal function of IBF are studied. Finally, aФ 160 mm flat mirror is polished by a serial mode combined polishing technology. After serial mode com bined polishing, the surface error and roughness of the flat mirror are 2.06 and 0.42 nm RMS, respectively. The experiment results indicate that the serial mode combined polishing technology is effective for polishing ultra-precise flat mirror.

分 类 号：TP312[自动化与计算机技术—计算机软件与理论] TS933.5[自动化与计算机技术—计算机科学与技术]