Fabrication of optical fiber sensor based on double-layer SU-8 diaphragm and the partial discharge detection  

作　　者：商娅娜 倪晴燕 丁丁 陈娜 王廷云 

机构地区：[1]Key Laboratory of Specialty Fiber Optics and Optical Access Networks, Shanghai University

出　　处：《Optoelectronics Letters》2015年第1期61-64,共4页光电子快报（英文版）

基　　金：supported by the National Basic Research Program of China(No.2012CB723405);the Science and Technology Commission of Shanghai Municipality(Nos.13510500300,14DZ1201403 and 14511105602)

摘　　要：In this paper, a partial discharge detection system is proposed using an optical fiber Fabry-Perot(FP) interferometric sensor, which is fabricated by photolithography. SU-8 photoresist is employed due to its low Young's modulus and potentially high sensitivity for ultrasound detection. The FP cavity is formed by coating the fiber end face with two layers of SU-8 so that the cavity can be controlled by the thickness of the middle layer of SU-8. Static pressure measurement experiments are done to estimate the sensing performance. The results show that the SU-8 based sensor has a sensitivity of 154.8 nm/kP a, which is much higher than that of silica based sensor under the same condition. Moreover, the sensor is demonstrated successfully to detect ultrasound from electrode discharge.

关 键 词：envelope chromatic modulator wideband photonic receiver filtering impulse optics narrow 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]