皮秒激光剥蚀固体进样系统的研制  

Development of the solid sampling system with picosecond laser ablation

作　　者：金献忠[1] 陈建国[1] 谢健梅[1] 郭亮[1] 张建波[1] 

机构地区：[1]宁波出入境检验检疫局,宁波315012

出　　处：《分析试验室》2015年第1期104-107,共4页Chinese Journal of Analysis Laboratory

基　　金：国家质检总局科技计划项目(2013IK010;2012IK043)资助

摘　　要：研制了一款皮秒激光剥蚀固体进样系统(ps LA)。该装置由激光器、激光束聚焦系统、样品池、气溶胶传输系统、观察系统、样品移动平台等几部分组成。激光器的输出波长可选,有1064,532,355和266 nm 4种,脉冲宽度30 ps,脉冲频率20 Hz。选用266 nm的波长进行性能表征,脉冲能量可达3.0 m J,剥蚀坑呈圆形,边缘陡峭,空间分辨率小于30μm,时间分辨率小于2 s,单位脉冲剥蚀量为20 nm。该装置与ICP-MS联用可实现固体样品的直接分析。A solid sampling system with picosecond laser ablation was developed in the paper. The device was made of a picosecond laser, beam focus optics, sample cell, aerosol delivery system, viewing system, and sample moving platform. The picosecond laser gave four kinds of wavelengths, including 1064 nm, 532 nm, 355 nm, and 266 nm, and any kind of the wavelengths was alternative. The laser pulse width was 30 ps, and the pulse frequency was 20Hz. The performances of the device were given with 266 nm picosecond laser ablation, the pulse energy was up to 3.0 m J, the crater in copper sheet was circular and its profile was steep, spatial resolution was less than 30 μm, time resolution was shorter than 2 s, and depth per pulse was 20 nm. The device coupled to ICP-MS was realized to analyze solid samples directly.

关 键 词：皮秒激光 激光剥蚀 固体进样系统 电感耦合等离子体质谱 

分 类 号：O652.6[理学—分析化学]